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Yoshigoe, Akitaka; Moritani, Kosuke; Teraoka, Yuden
Japanese Journal of Applied Physics, Part 1, 42(6B), p.3976 - 3982, 2003/06
Times Cited Count：6 Percentile：28.18(Physics, Applied)It is well known that the thermal oxidation on Si(001) surface is an important reaction system to form of the gate-oxide films in MOSFET, since it is necessary to control the film thickness under a few nano-meter scale. Thus, we have studied the oxygen uptake and the Si oxidation states depending on the oxidation times by using the synchrotron radiation photoemission spectroscopy in 1
10
Pa of O
at the surface temperature from 870K to 1120K. We clarified the oxidation depending on the surface temperature was explained by the kinetics (Langumuir and auto-catalytic model). Using real time photoemission spectroscopy, we found that the Si
sepcies was not formed at the initial oxidation stage.
Lavrentiev, V.; Abe, Hiroaki; Yamamoto, Shunya; Naramoto, Hiroshi; Narumi, Kazumasa
Surface and Interface Analysis, 35(1), p.36 - 39, 2003/01
Times Cited Count：8 Percentile：22.7(Chemistry, Physical)no abstracts in English
Onuki, Akira;
Proc. of 5th Int. Topical Meeting on Nuclear Thermal Hydraulics,Operations and Safety, 00(00), p.1 - 6, 1997/04
no abstracts in English
Kumamaru, Hiroshige; Suzuki, Mitsuhiro; Anoda, Yoshinari; Nakamura, Hideo; Yonomoto, Taisuke; Murata, Hideo
JAERI-M 91-167, 293 Pages, 1991/10
no abstracts in English
Nakamura, Hideo; Tasaka, Kanji; Suzuki, Mitsuhiro; Anoda, Yoshinari; Kumamaru, Hiroshige; Yonomoto, Taisuke; Murata, Hideo
JAERI-M 89-131, 260 Pages, 1989/09
no abstracts in English
Nakamura, Hideo; Tasaka, Kanji; Suzuki, Mitsuhiro; Anoda, Yoshinari; Kumamaru, Hiroshige; Yonomoto, Taisuke; Murata, Hideo
JAERI-M 89-130, 127 Pages, 1989/09
no abstracts in English
; Koizumi, Yasuo; ; Tasaka, Kanji
Journal of Nuclear Science and Technology, 24(10), p.844 - 858, 1987/10
Times Cited Count：0 Percentile：0.02(Nuclear Science & Technology)no abstracts in English
; *; ; ; *; Murao, Yoshio
JAERI-M 87-052, 112 Pages, 1987/03
no abstracts in English
Koizumi, Yasuo; ; Tasaka, Kanji; J.A.Findlay*; L.S.Lee*
Nucl.Eng.Des., 102, p.151 - 163, 1987/00
Times Cited Count：2 Percentile：29.78(Nuclear Science & Technology)no abstracts in English
Koizumi, Yasuo; Tasaka, Kanji
Journal of Nuclear Science and Technology, 23(11), p.1008 - 1017, 1986/11
Times Cited Count：3 Percentile：40.89(Nuclear Science & Technology)no abstracts in English
; Tasaka, Kanji; Koizumi, Yasuo; ; ; ; ;
JAERI-M 85-209, 236 Pages, 1986/01
no abstracts in English
; ; ; ; ; Murao, Yoshio
Proc.2nd Int.Topical Meeting on Nuclear Power Plant Thermal Hydraulics and Operations, p.2 - 104, 1986/00
no abstracts in English
; Koizumi, Yasuo; ; ; ; ; ; Tasaka, Kanji
JAERI-M 85-128, 217 Pages, 1985/09
no abstracts in English
; ; ; Tasaka, Kanji; ; ; ; ;
JAERI-M 85-029, 188 Pages, 1985/03
no abstracts in English
Koizumi, Yasuo; *; ; Tasaka, Kanji
Nucl.Eng.Des., 86, p.267 - 287, 1985/00
Times Cited Count：4 Percentile：54.56(Nuclear Science & Technology)no abstracts in English
Tasaka, Kanji; ; ; Koizumi, Yasuo; ;
Nuclear Technology, 68, p.77 - 93, 1985/00
Times Cited Count：8 Percentile：71.5(Nuclear Science & Technology)no abstracts in English
; ; ; Tasaka, Kanji; ; ; ; ;
JAERI-M 84-229, 153 Pages, 1984/12
no abstracts in English
*; ; Tasaka, Kanji
JAERI-M 84-188, 97 Pages, 1984/10
no abstracts in English
; ; Tasaka, Kanji; ; ; ; ;
JAERI-M 84-100, 197 Pages, 1984/06
no abstracts in English
; Tasaka, Kanji; ; ; ; ; ;
JAERI-M 84-045, 229 Pages, 1984/03
no abstracts in English
